[H-8-4] Orientation Control of Large Grain Poly-Si on Glass by Interfacial Oxide Layer Controlled Al-Induced Crystallization

M. Kurosawa¹、N. Kawabata¹、T. Sadoh¹、M. Miyao¹ (1.Kyushu Univ.)

https://doi.org/10.7567/SSDM.2009.H-8-4