[I-5-5L] Deterioration of mechanical characteristics of micro-cantilevers by plasma induced damage

M. Tomura¹, Y. Yoshida¹, T. Ono¹, C. H. Huang¹, S. Samukawa¹ (1.Tohoku Univ.)

https://doi.org/10.7567/SSDM.2009.I-5-5L