[J-5-2] Enhancement-mode MOCVD Grown ZnO TFTs on Glass Substrates using N₂O Plasma Treatment

K. Remashan¹, Y. S. Choi¹, S. J. Park¹, J. H. Jang¹ (1.Gwangju Inst. Of Sci. and Tech.)

https://doi.org/10.7567/SSDM.2009.J-5-2