[J-6-5] Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection

F. A. Hassani¹、C. Cobianu²、S. Armini³、V. Petrescu⁴、P. Merken⁴、D. Tsamados⁵、A. M. Ionescu⁵、Y. Tsuchiya¹、H. Mizuta¹ (1.Univ. of Southampton(UK)、2.Honywell Romania SRL(Romania)、3.IMEC(Belgium)、4.Stichting IMEC-NL(Netherland)、5.EPFL(Switzerland))

https://doi.org/10.7567/SSDM.2009.J-6-5