[M-8-4] Orientation Control of Al-Induced Crystallized Silicon by Diffusion Barrier Layers

A. Okada¹、K. Toko¹、K. Hara²、N. Usami^2,3、T. Suemasu^1,3 (1.Univ. of Tsukuba、2.Tohoku Univ.、3.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.M-8-4