[M-9-4L] Germanium layer Transfer with Epitaxial Lift-off Technique

T. Maeda¹、H. Ishii¹、T. Itatani¹、T. Takada²、M. Hata²、T. Yasuda¹ (1.AIST、2.Sumitomo Chemical Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.M-9-4L