MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient by Employing Crystalline-TiO<sub>2</sub>/SiO<sub>2</sub> Stacked Dielectric

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

C. C. Lin¹, W. Y. Ou¹, J. R. Wu¹, M. L. Wu¹, L. L. Chen¹, Y. H. Wu¹ (1.National Tsing Hua Univ. , Taiwan)