[E-6-1] Design-friendly scalability of cost-effective 28LP Tech. platform featuring 2nd generation gate-first HK/MG transistors without eSiGe

H. Fukutome¹, S. D. Kwon¹, S. Maeda¹, S. Paak¹ (1.System LSI business, Samsung Electronics Co., Ltd. , Korea)

https://doi.org/10.7567/SSDM.2012.E-6-1