[H-6-5] Fat damascene wires for high bandwidth routing in silicon interposer

M. Detalle¹、J. Kim¹、P. Nolmans¹、X. Sun¹、J. Ryckaert¹、A. La Manna¹、G. Beyer¹、E. Beyne¹ (1.InterUniv. MicroElectronics Center , Belgium)

https://doi.org/10.7567/SSDM.2012.H-6-5