[K-2-3] Annealing Condition Optimization of Sputtered Amorphous Carbon for Large-grain, Multi-layer Graphene

M. Sato¹, H. Nakano¹, M. Takahashi¹, T. Muro², Y. Takakuwa³, S. Sato¹, M. Nihei¹, N. Yokoyama¹ (1.AIST/GNC, 2.JASRI/SPring-8, 3.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.K-2-3