[PS-1-6] Impacts of interfacial insulator on poly-crystalline germanium growth in low temperature processing

S. Kabuyanagi^1,2、T. Nishimura^1,2、K. Nagashio^1,2、A. Toriumi^1,2 (1.Univ. of Tokyo、2.JST-CREST , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-6