[P-1-3] An Alternative Technique for GeOI Fabrication

C.T. Chung¹, G.L. Luo², C.W. Chen¹, C.H. Chien^1,2 (1.National Chiao-Tung Univ., 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2013.P-1-3