[J-6-2] Strained Si_0.1Ge_0.9 on Strained-Si-on-Insulator (sSOI) pMOSFETs for Low-Power sSOI Based CMOS

K. Ikeda¹、Y. Moriyama¹、T. Irisawa¹、M. Ono¹、Y. Kamimuta¹、M. Oda¹、T. Miyaki¹、E. Kurosawa¹、T. Tezuka¹ (1.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.J-6-2