Wafer Scale Fabrication of Transistors using CVD-Grown Graphene and its Application to Inverter Circuit

S. Nakaharai; T. Iijima; S. Ogawa; K. Yagi; N. Harada; K. Hayashi; D. Kondo; M. Takahashi; S.L. Li; K. Tsukagoshi; S. Sato; N. Yokoyama

doi:https://doi.org/10.7567/SSDM.2014.P-7-3

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-7-3] Wafer Scale Fabrication of Transistors using CVD-Grown Graphene and its Application to Inverter Circuit

S. Nakaharai^1,2、T. Iijima²、S. Ogawa²、K. Yagi²、N. Harada²、K. Hayashi²、D. Kondo²、M. Takahashi²、S.L. Li¹、K. Tsukagoshi¹、S. Sato²、N. Yokoyama² (1.NIMS、2.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.P-7-3

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