The Japan Society of Applied Physics

2016 International Conference on Solid State Devices and Materials

2016 International Conference on Solid State Devices and Materials

2016年9月26日 〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

15:00 〜 17:00

[PS-1-01] Structural and Electrical Characterization of Epitaxial Ge Thin Film on Si (001) Formed by Sputtering

○S. Otsuka1, T. Mori1, Y. Morita1, N. Uchida1, Y. Liu1, S. O’uchi1, H. Fuketa1, S. Migita1, M. Masahara1, T. Matsukawa1 (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.PS-1-01