[Tu-P] Poster Presentation

[Tu-P-21] Damage characterization of GaN substrate with hot implant process

*Junko Maekawa¹, Hitoshi Kawanowa¹, Masahiko Aoki¹, Katsumi Takahiro², Toshiyuki Isshiki² (1. Ion Tech. Center Co.,Ltd(Japan), 2. Kyoto Inst. of Tech.(Japan))