The 26th International Display Workshops (IDW '19)

講演情報

Poster Presentation

[AMDp1] Oxide TFTs

2019年11月28日(木) 10:40 〜 13:10 Main Hall (1F)

10:40 〜 13:10

[AMDp1-18L] Microwave Assisted Amorphous Oxide Thin-Film Transistors with Polymer Gate Dielectrics

*SeongCheol Jang1, Kihyeon Bae1, Kyung Jin Lee1, Hyun-Suk Kim1 (1. Chungnam National University (Korea))

キーワード:Low-temperature, Microwave annealing, Polymer Dielectric

In this work, a-IGZO TFTs were fabricated at room temperature by the synergistic combination of microwave annealing and polymer gate dielectrics. a-IGZO TFTs were successfully fabricated at room temperature and show good electrical properties and stability.