[19p-D6-1~18] 6.4 薄膜新材料

▲ [19p-D6-1] In situ temperature measurement of oxide thin films at a nanosecond time scale during pulsed UV laser irradiation

^○KentaroShinoda¹,TomohikoNakajima¹,TetsuoTsuchiya¹ (AIST¹)

キーワード：excimer laser,temperature measurement,ELAMOD