Koji Sugioka

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発表者・著者、共著者

2017年9月8日(金) 13:15 〜 17:00 A410 (410)

一般セッション(口頭講演)
| 4 JSAP-OSA Joint Symposia 2017
| 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

[8p-A410-1~10] 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

13:15 〜 13:45

▲ [8p-A410-1] [JSAP-OSA Joint Symposia 2017 Invited Talk] Tailored Femtosecond Bessel Beam Processing - Application to Through Si Vias for 3D Si ICs -

〇Koji Sugioka¹、Fei He^1,2、Ya Cheng² (1.RIKEN RAP、2.SIOM, CAS)