Koji Sugioka

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:15 PM - 5:00 PM A410 (410)

Oral presentation
| 4 JSAP-OSA Joint Symposia 2017
| 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

[8p-A410-1~10] 4.8 Strong Light Excitation Phenomena Applied to Materials and Bio Engneering

1:15 PM - 1:45 PM

▲ [8p-A410-1] [JSAP-OSA Joint Symposia 2017 Invited Talk] Tailored Femtosecond Bessel Beam Processing - Application to Through Si Vias for 3D Si ICs -

〇Koji Sugioka¹, Fei He^1,2, Ya Cheng² (1.RIKEN RAP, 2.SIOM, CAS)