Session 5

[OPTM5-02(Invited)] Design of a spectroscopic imaging ellipsometer

*Lianhua Jin¹, Makoto Uehara¹, Takashi Iwao¹, Yuki Iizuka¹, Eiichi Kondoh¹, Bernard Gelloz² (1. Univ.Yamanashi, 2. Nagoya University,)