[A-9-4] High Performance Strained Si/SiGe N-channel MOSFETs: Impact of Alloy Composition and Layer Architecture

SH Olsen、LS Driscoll、KSK Kwa、S Chattopadhay、AG O'Neill (1.School of Electrical, Electronic and Computer Engineering, University of Newcastle, U.K.)

https://doi.org/10.7567/SSDM.2003.A-9-4