[P-9-7] High-Performance Polycrystalline Silicon Thin-Film Transistor with Nickel-Titanium Oxide by Sol-Gel Spin-Coating and Fluorine Implantation

S. C. Wu¹、T. H. Hou¹、S. H. Chuang²、H. C. Chou²、P. Y. Kuo¹、T. S. Chao¹、T. F. Lei¹ (1.National Chiao Tung Univ.、2.National Univ. of Kaohsiung , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-9-7