The Japan Society of Applied Physics

11:45 〜 12:00

[H-4-05] On-Chip Integration of RF Termination Resistor and Backside Via Hole in InP-Based Mach-Zehnder Modulator for Compact Coherent Transceiver

T. Kitamura1, M. Watanabe1, N. Kono1, T. Kikuchi1, R. Yamabi1, H. Tanaka1, M. Seki1, T. Katsuyama1, M. Ekawa1, H. Shoji1 (1.Sumitomo Electric Industries, LTD. (Japan))

https://doi.org/10.7567/SSDM.2018.H-4-05