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[2D09] High Temperature Formation Behavior of SiO2 Oxide Film Formed on Surface of SiC
Keywords:slicon carbide, silicon dioxide, High temperature oxidation behavior
For the purpose of investigating the soundness of the SiO2 oxide film formed on the surface of SiC under the condition of accident, the oxidation test was carried out on the SiC sample under the conditions of temperature: 1100, 1300, 1500 ℃., holding time: 25, 50, 100 h, Atmosphere: Air.
As a result, it was confirmed that the SiO2 film was cracked and multilayered structure, and it was found that the oxidation reaction did not stop depending on the condition even though SiO2 was formed.
As a result, it was confirmed that the SiO2 film was cracked and multilayered structure, and it was found that the oxidation reaction did not stop depending on the condition even though SiO2 was formed.