Poster

[2P1001-29-20] The effect of film structure on the thermal conductivity for Al2O3 thin films prepared by sputtering method

*Naoki Noda¹, Chinami Abe², Makoto Kashiwagi³, Yuichiro Yamashita⁴, Takashi Yagi⁵, Yuki Oguchi⁶, Naoyuki Taketoshi⁷, Yuzo Shigesato⁸ (1. Aoyama Gakuin University, 2. Aoyama Gakuin University, 3. Aoyama Gakuin University, PRESTO, 4. AIST, Aoyama Gakuin University, 5. AIST, Aoyama Gakuin University, 6. Aoyama Gakuin University, 7. AIST, Aoyama Gakuin University, 8. Aoyama Gakuin University)

Keywords:Thermal Conductivity, thin film, sputtering method, Al2O3