[CThA6D] Comb Metrology II

[CThA6D-02] Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

*Chen Lin¹, Siyu Zhou¹, Ruixue Zhang¹, Guanhao Wu¹ (1. Tsinghua Univ. (China))

[Presentation Style] Online

We present a method to measure the refractive index and lens surface spacing in optical systems simultaneously by dual-comb ranging. The repeatability precision of thickness and refractive index is better than 0.18 μm and 1.6×10^-4 .