[CThA6D] Comb Metrology II

[CThA6D-04] Phase Sensitive Surface Profile Measurement Using Swept Multigigahertz Supercontinuum Comb

*Samuel Choi^1,4, Takuro Yamazaki¹, Hiroshi Hibino^2,4, Takamasa Suzuki¹, Tatsutoshi Shioda³ (1. Niigata Univ. (Japan), 2. Osaka Univ. (Japan), 3. Saitama Univ. (Japan), 4. AMED-CREST, AMED (Japan))

[Presentation Style] Online

A full-field surface profiling technique using a frequency-tunable supercontinuum multi-gigahertz comb was proposed and demonstrated simultaneous amplitude and phase detection. Depth resolution was 30 µm and displacement accuracy of the measured plane was 19 nm.