High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

Xavier Xujie Chia

Presentation information

Oral Session

CLEO-PR2022 » Hybrid Material Integration for Silicon Photonics II

[CThP12D] Hybrid Material Integration for Silicon Photonics II

Thu. Aug 4, 2022 3:30 PM - 5:30 PM Room 201&202 (2F)

Session Chairs: Yuya Shoji (Tokyo Tech), Kazuhiro Ikeda (AIST)

4:45 PM - 5:00 PM

[CThP12D-05] High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

*Xavier Xujie Chia¹, Peng Xing¹, Ju Won Choi¹, Dawn Tse Hui Tan^1,2 (1. Singapore Univ. of Tech. and Design (Singapore), 2. A*STAR Inst. of Microelectronics (IME) (Singapore))

[Presentation Style] Online

Micro-Ring Resonators were fabricated on Deuterated Silicon-Rich Nitride films and characterised. Fabricated devices yield intrinsic quality factors of up to 127,000 and propagation losses of less than 2 dB/cm.