CLEO-PR2022/ISOM'22/ODF'22

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Oral Session

CLEO-PR2022 » Surface Micromachining and Nanostructuring

[CThP5D] Surface Micromachining and Nanostructuring

Thu. Aug 4, 2022 3:30 PM - 5:15 PM Room 206 (2F)

Session Chair: Godai Miyaji (Tokyo Univ. of Agriculture and Tech.)

3:30 PM - 4:00 PM

[CThP5D-01 (Invited)] Formation mechanisms of bumps and their avoidance during laser milling of metals

*Andreas Michalowski1, Fabian Nyenhuis2 (1. Institut für Strahlwerkzeuge (IFSW), University of Stuttgart (Germany), 2. Oertli Instruments (Switzerland))

[Presentation Style] Online

Studies of surface degradations in laser milling of metals reveal a multistage formation mechanism. Based on the findings on the formation mechanism of the bumps, a process was derived that enables shorter production times.