[CThP5D] Surface Micromachining and Nanostructuring

[CThP5D-01 (Invited)] Formation mechanisms of bumps and their avoidance during laser milling of metals

*Andreas Michalowski¹, Fabian Nyenhuis² (1. Institut für Strahlwerkzeuge (IFSW), University of Stuttgart (Germany), 2. Oertli Instruments (Switzerland))

[Presentation Style] Online

Studies of surface degradations in laser milling of metals reveal a multistage formation mechanism. Based on the findings on the formation mechanism of the bumps, a process was derived that enables shorter production times.