CLEO-PR2022/ISOM'22/ODF'22

講演情報

Oral Session

CLEO-PR2022 » Comb Metrology III

[CThP6E] Comb Metrology III

2022年8月4日(木) 13:45 〜 15:00 Room 204 (2F)

Session Chair: Youngjin Kim (KAIST)

14:00 〜 14:15

[CThP6E-02] Investigation of the effect of grating profile on the precision of 2D single-shot comb-based interferometer

*Bao Thai Dinh1, Chiba Keishi1, Tuan Cong Truong2, Shioda Tatsutoshi1 (1. Saitama Univerisity (Japan), 2. Ha Noi Univerisity of Science and Technology (Viet Nam))

[Presentation Style] Onsite

The research theoretically analyzes the system specifications and designs the experiment to verify the effect of the discrete profile of the grating on the profilometry precision of the novel 2D single-shot comb-based interferometer.