CLEO-PR2022/ISOM'22/ODF'22

Presentation information

Oral Session

CLEO-PR2022 » Si and SiN Photonics

[CThP8F] Si and SiN Photonics

Thu. Aug 4, 2022 3:30 PM - 5:30 PM Small Hall (2F)

Session Chair: Yuriko Maegami (AIST)

5:15 PM - 5:30 PM

[CThP8F-07] Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

*Myung Seok Hong1, Dong Uk Kim1, Min gi Lim1, Dong Ju Choi1, Man Jae Her1, Young Jae Park1, Youngjae Jeong2, Jongwoo Park2, Seungjun Han2, Kyoungsik Yu2, Sangyoon Han1 (1. DGIST (Korea), 2. KAIST (Korea))

[Presentation Style] Onsite

We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062–0.524 nm) as well as extinction ratio (1–16 dB). Static power consumption is less than 16 nW.