[CThP8F] Si and SiN Photonics

[CThP8F-07] Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

*Myung Seok Hong¹, Dong Uk Kim¹, Min gi Lim¹, Dong Ju Choi¹, Man Jae Her¹, Young Jae Park¹, Youngjae Jeong², Jongwoo Park², Seungjun Han², Kyoungsik Yu², Sangyoon Han¹ (1. DGIST (Korea), 2. KAIST (Korea))

[Presentation Style] Onsite

We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062–0.524 nm) as well as extinction ratio (1–16 dB). Static power consumption is less than 16 nW.