CLEO-PR2022/ISOM'22/ODF'22

Presentation information

Oral Session

CLEO-PR2022 » THz Detection, Sensing, and Manipulation

[CTuP3D] THz Detection, Sensing, and Manipulation

Tue. Aug 2, 2022 3:30 PM - 5:15 PM Room 201&202 (2F)

Session Chair: Takeshi Yasui (Tokushima Univ.)

4:30 PM - 4:45 PM

[CTuP3D-04] Profile control of silicon moth-eye structures for terahertz antireflection fabricated by femtosecond laser processing

*Xi Yu1, Yuki Yasunaga2, Kazusa Goto2, Dejun Liu3, Makoto Kuwahara1,4, Shingo Ono2 (1. IMaSS, Nagoya Univ. (Japan), 2. Dept. Phys. Sci. and Eng., Nitech (Japan), 3. Dept. Phys., Shanghai Normal Univ. (China), 4. Grad. Sch. Eng., Nagoya Univ. (Japan))

[Presentation Style] Onsite

Micro tapers with different profiles were fabricated by using femtosecond laser processing, and these tapers were employed to constitute moth-eye structures for terahertz frequencies. The relationship between profiles and antireflective performance is quantitatively analyzed.