[CTuP3D] THz Detection, Sensing, and Manipulation

[CTuP3D-04] Profile control of silicon moth-eye structures for terahertz antireflection fabricated by femtosecond laser processing

*Xi Yu¹, Yuki Yasunaga², Kazusa Goto², Dejun Liu³, Makoto Kuwahara^1,4, Shingo Ono² (1. IMaSS, Nagoya Univ. (Japan), 2. Dept. Phys. Sci. and Eng., Nitech (Japan), 3. Dept. Phys., Shanghai Normal Univ. (China), 4. Grad. Sch. Eng., Nagoya Univ. (Japan))

[Presentation Style] Onsite

Micro tapers with different profiles were fabricated by using femtosecond laser processing, and these tapers were employed to constitute moth-eye structures for terahertz frequencies. The relationship between profiles and antireflective performance is quantitatively analyzed.