3:30 PM - 4:00 PM
[CTuP5B-01 (Invited)] Processing the bulk of silicon using IR ultrashort laser pulses – from waveguides to welding
[Presentation Style] Online
We report on processing the bulk of silicon with infrared ultrashort laser pulses. The localized energy deposition and resulting material modifications enable various applications, from the inscription of waveguides to dicing and semiconductor–metal welding.