[CTuP5B] 3D and Volume Processing

[CTuP5B-02] Micro Raman tomographic imaging on laser internal damage into sapphire for laser cleaving process

*Teppei Onuki¹, Junnosuke Kuroda¹, Kazuki Kaneko¹, Hirotaka Ojima¹, Jun Shimizu¹, Libo Zhou¹ (1. Ibaraki Univ. (Japan))

[Presentation Style] Onsite

We attempt micro Raman Tomographic magingI technique to the evaluation of the location, size, and the severity of laser induced damage on sapphire toward the laser cleaving process