[CWP10B] Passive and Active Waveguide Devices

[CWP10B-02] Cascaded multi-stage directional coupler on silicon-on-insulator

*Cheng Tse Tang¹, Chewn Pu Jou¹, Lan Chou Cho¹, Fong Wei Kuo¹, Ming Yang Chung¹, Tai Chun Huang¹, Yung Jr Hung² (1. TSMC Manufac. (Taiwan), 2. NSYSU Univ. (Taiwan))

[Presentation Style] Online

We demonstrate the feasibility of a width-engineered cascaded multi-stage directional coupler on silicon-on-insulator for broadband (within 5% power variation over 100 nm wavelength range) and fabrication tolerant operation (1 standard deviation= 2.5% across 12-inch wafer).