[ITuPG] Special Invited

[ITuPG-01 (Invited)] Exploitation of the whole Information Content of the Light Field for the Inspection of Micro- and Nano-Components: Approaches & Limitations

*Wolfgang Osten¹, Maria Laura Goedecke (1. Univ. Stuttgart (Germany))

[Presentation Style] Online

The current challenges for optical metrology and the physical limitations are addressed. Afterwards a systematization of existing approaches for resolution enhancement is presented and some modern approaches taking into account the whole information content of the light field are discussed.