CLEO-PR2022/ISOM'22/ODF'22

Presentation information

Oral Session

ISOM '22 » Special Invited

[ITuPG] Special Invited

Tue. Aug 2, 2022 1:30 PM - 2:00 PM Room 107&108 (1F)

Session Chairs: Tetsuhiko Muroi (NHK), Takayuki Shima (AIST)

1:30 PM - 2:00 PM

[ITuPG-01 (Invited)] Exploitation of the whole Information Content of the Light Field for the Inspection of Micro- and Nano-Components: Approaches & Limitations

*Wolfgang Osten1, Maria Laura Goedecke (1. Univ. Stuttgart (Germany))

[Presentation Style] Online

The current challenges for optical metrology and the physical limitations are addressed. Afterwards a systematization of existing approaches for resolution enhancement is presented and some modern approaches taking into account the whole information content of the light field are discussed.