[OThP4B] New Technologies II

[OThP4B-02] Ghost Imaging with Complementary Correlation Calculations Using Deep Learning

*Shoma Kataoka¹, Yasuhiro Mizutani¹, Tsutomu Uenohara¹, Yasuhiro Takaya¹, Osamu Matoba² (1. Osaka Univ. (Japan), 2. Kobe Univ. (Japan))

[Presentation Style] Onsite

For nano defects inspection, a fast and robust method is required. Combining ghost imaging with deep learning reduces measurement time but decreases robustness. This report uses deep learning to complement the correlation calculation improves robustness.