CLEO-PR2022/ISOM'22/ODF'22

講演情報

Poster Session

CLEO-PR2022 » Poster Session

[P-CM11] C11. Semiconductor and Integrated Optical Devices

2022年8月1日(月) 18:00 〜 20:00 Main Hall (1/3) (1F)

[P-CM11-03] A New Method for Measuring AlGaOx Oxidation Width of Circular Defect in 2D Photonic Crystal (CirD) Laser

*Rubing Zuo1, Shunsuke Miyazaki1, Ryosei Kinoshita1, Hanqiao Ye1, Masaya Morita1, Kenta Kaichi1, Masato Morifuji1, Hirotake Kajii1, Akihiro Maruta1, Masahiko Kondow1 (1. Osaka Univ. (Japan))

[Presentation Style] Onsite

To develop the CirD laser, which will be used in intra-chip optical interconnects, we investigate a new method to measure the oxidation width of AlGaOx precisely so that we can obtain the most appropriate Q factor.