[P-CTh5] C5. Laser Processing and Innovative Applications

[P-CTh5-03] Surface cleavage of zinc oxide induced by femtosecond laser irradiation

*Xi Yu¹, Yuma Takeda², Shuta Hamasaki³, Takafumi Ishida^1,3, Makoto Kuwahara^1,3, Koh Saitoh^1,3, Fumihiro Itoigawa⁴, Shingo Ono² (1. IMaSS, Nagoya Univ. (Japan), 2. Dept. Phys. Sci. and Eng., Nitech (Japan), 3. Grad. Sch. Eng., Nagoya Univ. (Japan), 4. Dept. Electr. and Mech., Nitech (Japan))

[Presentation Style] Onsite

Cleavage along the crystalline and cleavage-melt shift were observed on the surface of a ZnO substrate when it was irradiated by single and multiple femtosecond laser pulses, respectively.