[P-CTh6] C6. Optical and Photonic Metrology

[P-CTh6-14] Step Height Measurement via Vortex Beam Diffraction

*Dina Grace C. Banguilan¹, Nathaniel P. Hermosa II¹ (1. University of the Philippines Diliman (Philippines))

[Presentation Style] Online

We measure the height of a single reflective step through vortex beam diffraction by a triangular aperture. By calculating the SSIM index between the patterns, we can identify theoretically within 0 to \lambda/4 height difference.