CLEO-PR2022/ISOM'22/ODF'22

Presentation information

Poster Session

ODF '22 » Poster Session

[P-OTh] ODF '22 Poster Session

Thu. Aug 4, 2022 6:00 PM - 8:00 PM Main Hall (1/3) (1F)

[P-OTh-19] Defect mapping of metal contaminated Si wafers by a laser heterodyne photothermal displacement method

*Tomoki Harada1,2, Kosuke Morita1, Shogo Harada1, Hiroki Ohyama1, Tetsuo Ikari1, Atsuhiko Fukuyama1 (1. Univ. of Miyazaki (Japan), 2. JSPS Research Fellow (Japan))

[Presentation Style] Onsite

To investigate the distribution of nonradiative recombination centers of semiconductors, we developed a laser heterodyne photothermal displacement method. Mapping measurement for contaminated Si was conducted and revealed the defect patterns.