[P-OTh] ODF '22 Poster Session

[P-OTh-19] Defect mapping of metal contaminated Si wafers by a laser heterodyne photothermal displacement method

*Tomoki Harada^1,2, Kosuke Morita¹, Shogo Harada¹, Hiroki Ohyama¹, Tetsuo Ikari¹, Atsuhiko Fukuyama¹ (1. Univ. of Miyazaki (Japan), 2. JSPS Research Fellow (Japan))

[Presentation Style] Onsite

To investigate the distribution of nonradiative recombination centers of semiconductors, we developed a laser heterodyne photothermal displacement method. Mapping measurement for contaminated Si was conducted and revealed the defect patterns.