The 24th Congress of the International Commission for Optics

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Oral Presentation

10: X-ray and High-energy Optics

[Tu2N] X-ray Optics II

Tue. Aug 22, 2017 1:00 PM - 3:00 PM Room N (KAEDE) (4F)

Session Chair:W. Yun(Sigray, Inc.), T. Ohigashi(Inst. for Molecular Science)

1:30 PM - 2:00 PM

[Tu2N-02 (Invited)] Extreme Ultraviolet Systems for Imaging and Metrology at the Nanoscale

○P. Naulleau 1, C.N. Anderson 1, M.P. Benk 1, W.L. Chao 1, K.A. Goldberg 1, E.M. Gullikson 1, R.H. Miyakawa 1, A. Wojdyla 1, S.A. Sherwin 2, Y.G. Wang 2, A.R. Neureuther 2 (1.Berkeley Lab (USA), 2.University of California Berkeley)

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