The 24th Congress of the International Commission for Optics

講演情報

印刷

Oral Presentation

10: X-ray and High-energy Optics

[Tu2N] X-ray Optics II

2017年8月22日(火) 13:00 〜 15:00 Room N (KAEDE) (4F)

Session Chair:W. Yun(Sigray, Inc.), T. Ohigashi(Inst. for Molecular Science)

13:30 〜 14:00

[Tu2N-02 (Invited)] Extreme Ultraviolet Systems for Imaging and Metrology at the Nanoscale

○P. Naulleau 1, C.N. Anderson 1, M.P. Benk 1, W.L. Chao 1, K.A. Goldberg 1, E.M. Gullikson 1, R.H. Miyakawa 1, A. Wojdyla 1, S.A. Sherwin 2, Y.G. Wang 2, A.R. Neureuther 2 (1.Berkeley Lab (USA), 2.University of California Berkeley)

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