ICPE2020

Presentation information

Oral Sessions

B-3 Micro/Nano machining and figurings

[B-3-2] Numerically Controlled Plasma Chemical Vaporization Machining Using an Array-Type Electrode with an Intermittent Gas Flow System

〇Ryohei Asada1, Ken Nishida1, Shinya Okayama1, Satoshi Matsuyama1, Kazuto Yamauchi1, Yasuhisa Sano1 (1.Osaka University, 2.Osaka University)

Keywords:Processing、Numerically controlled processing、Array-Type Electrode