ICPE2020

講演情報

Oral Sessions

B-3 Micro/Nano machining and figurings

[B-3-2] Numerically Controlled Plasma Chemical Vaporization Machining Using an Array-Type Electrode with an Intermittent Gas Flow System

〇Ryohei Asada1、Ken Nishida1、Shinya Okayama1、Satoshi Matsuyama1、Kazuto Yamauchi1、Yasuhisa Sano1 (1.Osaka University、2.Osaka University)

キーワード:Processing、Numerically controlled processing、Array-Type Electrode